| Name | Description |
|---|---|
| materialSpec | Quantity |
| transXSpec | Quantity |
| transYSpec | Quantity |
| transZSpec | Quantity |
| thermalSpec | Quantity |
| materialMeas | Material quantity |
| transXMeas | X-axis translational quantity |
| transYMeas | Y-axis translational quantity |
| transZMeas | Z-axis translational quantity |
| thermalMeas | Thermal quantity |